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Updated: Jul 7, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Multiparameter tuning of surface-acoustic-wave filters
1Dept. of Electr. Eng., Louisville Univ., KY.
Abstract:
An experimental methodology for tuning the frequency response of surface-acoustic-wave (SAW) filters after initial fabrication is demonstrated. The sensitivity of such a filter to perturbations in the length of individual electrodes of the interdigital transducer is determined from highly accurate swept-frequency measurements. Sensitivity measurements from several electrodes are then used to synthesize improved filter responses. Sensitivity measurements, measurement accuracy, and control of frequency-response sidelobes are demonstrated for devices fabricated on (YZ) lithium niobate. The tuning method provides predictions of improvement that closely match actual performance.
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