Acoustoelectric detection of ultrasound power with composite piezoelectric and semiconductor devices

The acoustoelectric interaction between an ultrasound wave propagating in a thin piezoelectric plate and an adjacent semiconductor results in a current that is proportional to the ultrasound intensity. These devices, inherently insensitive to the phase of the acoustic wavefront, can be used for large-area total power meters as well as spot intensity meters. They have broadband response and are capable of following the envelope of typical diagnostic imaging pulses. A previously derived model describing the interaction is reviewed. Experimental results obtained with several detectors are presented, including sensitivity and frequency response.