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Published on: August 5, 2013
Microphonic sensitivity of surface-acoustic-wave resonators
1Hewlett-Packard Lab., Palo Alto, CA.
Summary
Surface-acoustic-wave resonators (SAWRs) exhibit microphonic sensitivities around 1 ppb/g when subjected to vibration. This frequency shift due to acceleration was measured directly and confirmed using an oscillator loop.
Area of Science:
- Physics
- Materials Science
- Electrical Engineering
Background:
- Surface-acoustic-wave resonators (SAWRs) are sensitive to external stimuli.
- Acceleration can induce unwanted frequency shifts in resonators, impacting device performance.
- Understanding and quantifying the microphonic effect in SAWRs is crucial for high-precision applications.
Purpose of the Study:
- To measure the resonant frequency shift in SAWRs caused by acceleration.
- To quantify the microphonic sensitivity of SAWRs under various vibration conditions.
- To compare the microphonic behavior of SAWRs with traditional bulk crystal resonators.
Main Methods:
- SAWR devices were vibrated across a frequency range of 5 Hz to 10 kHz with accelerations from 10⁻² to 10³ g.
- Vibration was applied both normal to and in the plane of the surface acoustic wave propagation.
- An oscillator loop was used to confirm direct measurements by analyzing FM sidebands.
Main Results:
- SAWRs demonstrated microphonic sensitivities on the order of 1 part per billion per g (ppb/g).
- The measured frequency shifts were consistent across different vibration orientations.
- Bulk crystal resonators showed comparable microphonic sensitivities but with a significantly wider range.
Conclusions:
- SAWRs possess measurable microphonic sensitivities, indicating susceptibility to acceleration-induced frequency shifts.
- The direct measurement and oscillator loop methods provide reliable quantification of this effect.
- SAWRs offer a viable alternative to bulk crystal resonators in applications where microphonic noise is a concern.

