Time-of-flight analyzer system to detect reflected particles from a solid surface following low-energy particle...

We have developed a time-of-flight analyzer to measure energy distributions of reflected particles from solid surfaces bombarded by low-energy (1-2 keV) ions. The analyzer yields energy distributions of neutrals which can be compared with the energy distributions of charged particles measured by a magnetic deflection-type momentum analyzer. We have tested the system to measure the angular dependence of energy and intensity for neutrals reflected from a polycrystalline W target. The energies of the reflected neutrals are much smaller than the incident ion energies, suggesting multiple scattering in the target. No angular dependence is observed under the condition that the sum of the incident and reflected angles is constant. The intensity of the reflected neutrals takes the maximum around the mirror angle. We compare these characteristics of neutral particle reflections with those of reflected ions.