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Updated: Jul 7, 2026
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Design and Use of an Apparatus for Presenting Graspable Objects in 3D Workspace
Published on: August 8, 2019
Design, implementation, and control of a six-axis compliant stage
Kaixuan Hu1, Jung H Kim, James Schmiedeler
1Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210, USA.
The Review of Scientific Instruments
|March 5, 2008
Summary
A new compact six-axis compliant stage uses piezoelectric actuators for nanometer-resolution motion control. Real-time visual feedback and advanced amplifiers enable precise six-axis actuation for enhanced precision engineering applications.
Area of Science:
- Precision Engineering
- Robotics
- Mechanical Engineering
Background:
- High-precision motion control is crucial for advanced manufacturing and scientific research.
- Existing stages often face limitations in range, resolution, or compactness.
- Integrating metrology directly into the object space is key for real-time feedback control.
Purpose of the Study:
- To develop a novel compact six-axis compliant stage with nanometer resolution.
- To integrate direct metrology for high-precision motion control.
- To achieve a greater motion range using innovative amplification mechanisms.
Main Methods:
- Utilized piezoelectric actuators for six-axis actuation.
- Designed a decoupled mechanical structure with two-tap and semibridge displacement amplifiers.
- Implemented laterally sampled white light interferometry for out-of-plane motion measurement.
- Developed a real-time in-plane motion estimation model using visual feedback.
- Integrated a visual tracking system for precision six-axis real-time visual servo-control.
Main Results:
- Achieved motion ranges of up to 77.42 microm (translation) and 3.10 mrad (rotation).
- Demonstrated resolutions as fine as +/-5 nm for translation and +/-10 murad for rotation.
- Successfully realized precision six-axis real-time visual servo-control through integrated systems.
Conclusions:
- The developed compact six-axis compliant stage offers high precision and extended motion range.
- The integration of direct metrology and advanced amplification techniques is effective for motion control.
- This stage provides a robust platform for applications requiring precise six-dimensional positioning.
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