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Published on: November 16, 2018
Mass-transport fabrication of off-axis and prismatic gallium phosphide optics
1Department of Electrical and Computer Engineering, University of Minnesota, 4-174 EEyCSci, 200 Union Street Southeast, Minneapolis, Minnesota 55455, USA. tballen@ece.umn.edu
Abstract:
Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.

