Heterodyne interferometer with subatomic periodic nonlinearity

C M Wu1, J Lawall, R D Deslattes

  • 1Physics Laboratory, National Institute of Standards and Technology, Building 221, Room A141, Gaithersburg, Maryland 20899, USA.

Applied Optics
|March 8, 2008
PubMed
Summary

A novel heterodyne interferometer eliminates periodic nonlinearity for precise differential displacement measurements. This new design achieves sub-20 picometer nonlinearity, overcoming limitations of traditional methods.

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