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Related Experiment Video

Updated: Jul 6, 2026

Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films

Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films

Published on: January 26, 2016

Windows in ellipsometry measurements.

G E Jellison¹

¹Solid State Division, Oak Ridge National Laboratory, Building 3025 MS 6030, PO Box 2008, Oak Ridge, Tennessee 37831-2008, USA.

|March 8, 2008

Summary

Ellipsometry measurements are affected by windows or lenses, requiring three parameters to describe window retardation. Two parameters can be measured simultaneously with isotropic samples, but the third requires separate measurement.

Area of Science:

Optical Physics
Materials Science
Metrology

Background:

Ellipsometry is a powerful technique for characterizing material properties.
The presence of optical elements like windows or lenses can introduce systematic errors.
Understanding and correcting for these effects is crucial for accurate measurements.

Purpose of the Study:

To investigate the impact of windows/lenses on general ellipsometry measurements.
To determine the parameters needed to describe window retardation effects.
To develop methods for measuring and correcting these effects.

Main Methods:

Theoretical analysis of ellipsometry measurements with intervening optical elements.
Experimental measurement of window retardation using a two-modulator generalized ellipsometer.

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Application of measured window parameters to correct sample data.

Main Results:

Three parameters are necessary to describe window retardation effects in ellipsometry.
Two window parameters can be measured concurrently with isotropic sample parameters.
The third window parameter and parameters for anisotropic samples require separate measurements.

Conclusions:

Window retardation significantly impacts ellipsometry accuracy.
A method is presented to measure and correct for window effects.
Accurate characterization of optical elements is essential for reliable ellipsometry data.