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Data-dependent systems profilometry of two-dimensional surfaces.

S M Pandit1, D P Chan

  • 1Department of Mechanical Engineering-Engineering Mechanics, Michigan Technological University, Houghton, Michigan 49931, USA. pand@mtu.edu

Applied Optics
|March 8, 2008
PubMed
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Data-dependent systems profilometry (DDSP) is extended to 2D surfaces, outperforming Fourier-transform profilometry (FTP) in surface roughness measurements. DDSP recovers detailed surface information, while FTP only shows global features.

Area of Science:

  • Optical metrology
  • Surface characterization
  • Interferometry

Background:

  • Fourier-transform profilometry (FTP) and data-dependent systems profilometry (DDSP) are established methods for 1D surface profile recovery from interferograms.
  • FTP has been successfully extended to 2D surface analysis.
  • A 2D extension of DDSP is needed for comprehensive surface metrology.

Purpose of the Study:

  • To introduce and evaluate a two-dimensional extension of data-dependent systems profilometry (DDSP).
  • To explore the feasibility of a common model order for autoregressive modeling in 2D DDSP.
  • To compare the performance of 2D DDSP against 2D Fourier-transform profilometry (FTP) for surface roughness measurements.

Main Methods:

  • Extension of DDSP to two dimensions using autoregressive modeling of interferogram rows/columns.

Related Experiment Videos

  • Investigation of a common model order for computational efficiency and error reduction.
  • Determination of autoregression mask length using Green's function.
  • Interferogram regeneration for result verification.
  • Main Results:

    • The 2D extension of DDSP successfully recovers detailed surface profiles.
    • DDSP demonstrates superior performance over FTP in root-mean-square (rms) and center-line average roughness measurements.
    • FTP primarily outlines global surface features, lacking the detail captured by DDSP.

    Conclusions:

    • The developed 2D DDSP method provides more accurate and detailed surface profile information compared to 2D FTP.
    • Common model order in 2D DDSP offers computational advantages and minimizes phase-removal errors.
    • 2D DDSP is a more effective technique for precise surface roughness characterization.