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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Simultaneous three-dimensional dynamic deformation measurements with pulsed digital holography.
S Schedin1, G Pedrini, H J Tiziani
1Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. schedin@ito311.ito.uni-stuttgart.de
Applied Optics
|March 8, 2008
Summary
Digital holography with a triple-illumination setup enables simultaneous measurement of 3D object deformation. This technique combines holographic data from multiple angles to accurately capture dynamic movements and shapes.
Area of Science:
- Optical Engineering
- Metrology
- Vibration Analysis
Background:
- Accurate measurement of three-dimensional (3-D) deformation is crucial for understanding object dynamics.
- Traditional methods often lack the simultaneous, full-field measurement capabilities required for complex vibrations.
Purpose of the Study:
- To develop and demonstrate a digital holographic method for simultaneous measurement of 3-D object deformation.
- To integrate shape measurement for a comprehensive analysis of vibrating objects.
Main Methods:
- Utilized digital holography with a double-pulse ruby laser and three illumination directions.
- Employed a single CCD image to incoherently add three independent digital holograms.
- Applied the Fourier-transform method for phase evaluation and the two-wavelength contouring method for shape measurement.
Main Results:
- Successfully obtained three phase maps representing deformation along distinct sensitivity vectors.
- Calculated the total 3-D deformation by vector resultant of the phase map data.
- Acquired 3-D shape information of the test object (cylinder).
Conclusions:
- The presented digital holographic approach enables simultaneous and accurate 3-D deformation measurement of vibrating objects.
- The combined deformation and shape analysis provides a complete understanding of object dynamics under transient and harmonic excitation.

