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Updated: Jul 6, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Design, implementation, and characterization of a kinematically aligned, cascaded spot- array generator for a
D F Brosseau1, F Lacroix, M H Ayliffe
1Photonic Systems Group, Department of Electrical and Computer Engineering, McGill University, 3480 University Street, Montréal, Québec H3A 2A7, Canada.
Abstract:
The design and the implementation of a modular spot-array generator for a modulator-based free-space optical interconnect is presented. Two cascaded diffractive optical elements produce 4 x 8 clusters on a 1600 microm x 800 microm pitch, where each cluster is a 4 x 4 array of (1/e(2)) 13.1-microm-radius spots on a 90-microm pitch. The spot-array generator is kinematically aligned to the interconnect system such that no realignment is necessary between removal and reinsertion. Characterization results are presented.

