High-Efficiency Light Coupling in a Submicrometric Silicon-on-Insulator Waveguide

Light coupling into a sub-micrometer-thick waveguide is usually done through a grating coupler. Coupling efficiency is strongly enhanced by addition of a mirror above the grating. This new kind of coupler can be designed to achieve efficiencies as great as 80%. Numerical calculations for a high-angular-spread Gaussian incident beam are compared with experimental results obtained for a standard silicon-on-insulator waveguide.