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Updated: Jul 6, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Abstract:
A 1-N-way resonator based on beam splitting and beam combining effects in rectangular cross-sectional multimode waveguides was recently proposed. Such a resonator structure offers a valuable way in which N low-power laser elements may be combined in a coherent fashion. We examine the case of passive 1-N-way resonators. We develop a theory of these 1-N-way structures to show that there is only one possible mode of these resonators. The theory is used to give a scaling law for the design tolerances of the beam splitting and beam combining region of the resonator.
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