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Characterization of excimer lasers for application to lenslet array homogenizers
Applied Optics
|March 22, 2008
Summary
Accurate laser characterization requires measuring the autocorrelation function at the critical spatial period. This method improves upon traditional angular divergence measurements for high-divergence lasers like excimer lasers.
Area of Science:
- Laser physics
- Optical engineering
- Metrology
Background:
- High-divergence lasers, such as excimer lasers, often exhibit fine-scale intensity nonuniformity.
- This nonuniformity arises from coherence effects in lenslet homogenizers.
Purpose of the Study:
- To determine the optimal method for characterizing high-divergence lasers.
- To identify a more accurate metric for assessing laser uniformity than standard angular divergence.
Main Methods:
- Detailed analysis of lenslet homogenizer performance.
- Direct measurement of the autocorrelation function at specific spatial periods.
Main Results:
- The autocorrelation function's value at the critical spatial period (lenslet separation) is crucial for accurate characterization.
- The 1/e(2) width of angular divergence is an insufficient metric, potentially misrepresenting laser effectiveness.
Conclusions:
- Direct measurement of the autocorrelation function at the critical spatial period provides the highest accuracy for characterizing laser uniformity.
- This method is superior to using the 1/e(2) width of angular divergence for evaluating lenslet homogenizers.

