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Measurement of steep aspheric surfaces using an anamorphic probe.

Amiya Biswas¹, Jeremy Coupland

¹Wolfson School of Mechanical and Manufacturing Engineering, Loughborough University, Ashby Road, Loughborough, Leicestershire, United Kingdom. A.Biswas@lboro.ac.uk

|April 12, 2008

Summary

This study enhances synthetic aperture interferometry for measuring complex shapes. New optics improve numerical aperture and light efficiency, enabling precise measurement of aspheric surfaces.

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Area of Science:

Optical Engineering
Metrology
Interferometry

Background:

Synthetic aperture interferometry (SAI) was proposed for in-process measurement of aspheric surfaces.
Previous fiber-optic probes lacked sufficient numerical aperture (NA) for steep surfaces and suffered efficiency loss with increased NA.

Purpose of the Study:

To develop an improved probe for synthetic aperture interferometry.
To enhance the numerical aperture (NA) and light-gathering efficiency of the probe for measuring aspheric optics.

Main Methods:

Introduced supplementary optics to increase the probe's numerical aperture.
Adopted an anamorphic optical design to boost light-gathering efficiency.
Utilized a scanning probe with enhanced optical components.

Main Results:

The new probe design successfully increased numerical aperture.
Anamorphic optics significantly improved light-gathering efficiency.
Demonstrated capability by measuring a spherical test optic of known form.

Conclusions:

The enhanced probe design overcomes limitations of previous fiber-optic probes for SAI.
The improved probe is capable of measuring aspheric surfaces with greater accuracy and efficiency.
This advancement facilitates in-process metrology for complex optical components.