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Ultrafast Time-resolved Near-IR Stimulated Raman Measurements of Functional π-conjugate Systems

Ultrafast Time-resolved Near-IR Stimulated Raman Measurements of Functional π-conjugate Systems

Published on: February 10, 2020

Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet.

Sébastien de Rossi¹, Denis Joyeux, Pierre Chavel

¹Laboratoire Charles Fabry de I'Institut d'Optique, CNRS, Université Paris Sud, Campus Polytechnique, Palaiseau, France. sebastien.derossi@insitutoptique.fr

|April 22, 2008

Summary

Low coherence interferometry reveals depth structure in multilayer reflectors using synchrotron light. This technique may enable new extreme ultraviolet optical coherence tomography methods for sample characterization.

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Area of Science:

Optics
Materials Science
Metrology

Background:

Characterizing complex multilayer structures is crucial for advanced optical and electronic devices.
Existing methods may lack the resolution or specificity for certain nanoscale materials.

Purpose of the Study:

To investigate the depth structure of a complex multilayer stack reflector.
To explore the application of low coherence interferometry in the extreme ultraviolet (EUV) spectral range.

Main Methods:

Utilizing a Fresnel's bi-mirror interferometer illuminated by wide-band synchrotron undulator light near 13.5 nm.
Employing low coherence interferometry for depth profiling.
Performing simulations to confirm signal behavior.

Main Results:

The complex multilayer reflector generates two back-propagated signals.
These signals effectively behave as if reflected from two distinct planes.
Successful demonstration of interferometry in the EUV spectral range for this application.

Conclusions:

Low coherence interferometry is effective for probing depth structure in multilayer reflectors.
The results suggest a novel physical approach for extreme ultraviolet sample characterization.
Potential for developing line-scan optical coherence tomography in the EUV spectrum.