Optimization of Cr/Sc-based multilayer mirrors for water window soft x-rays

The development of efficient multilayer mirrors for the water window (a spectral region between absorption edges of carbon and oxygen, from 284 to 543 eV) remains a challenge. As the best candidate, the Cr/Sc multilayer provides maximum theoretical reflectivity of about 60% at near-normal incidence around the Sc L_2,3 absorption edge (397 eV). However, the maximum measured peak reflectance published so far just slightly exceeds 20%. We report on a new (to the best of our knowledge) approach to design more efficient Cr/Sc-based multilayer coatings using the process of nitridation of chromium during deposition and adding boron carbide as a third material in the multilayer structure. We discuss our strategy of optimization of the CrN/B₄C/Sc multilayer system based on experimental studies. The peak reflectance as high as 32% at 396 eV was measured with this type of coating, which is of main interest for various water window applications such as x-ray microscopy.