Residual stress in obliquely deposited MgF2 thin films

Cheng-Chung Jaing1, Ming-Chung Liu, Cheng-Chung Lee

  • 1Department of Optoelectronic System Engineering, Optoelectronics Technology Research Center,Minghsin University of Science and Technology, Hsin-Chu 304, Taiwan. ccjaing@must.edu.tw

Applied Optics
|May 2, 2008
PubMed

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