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Updated: Jul 4, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
M Hofmann1, S Hauguth-Frank, V Lebedev
1Institute of Micro- and Nanotechnologies, Optical Engineering, Technical University Ilmenau, Ilmenau, Germany.
This study presents a novel planar integrated free-space optical system using binary phase diffractive optical elements (DOEs) fabricated on Gallium Nitride (GaN) on sapphire substrates, enabling monolithic integration of optical and electronic components.
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