Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: Jul 4, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

High efficiency silicon nitride surface grating couplers.

Guillaume Maire1, Laurent Vivien, Guillaume Sattler

  • 1Institut d'Electronique Fondamentale, CNRS UMR 8622, Bât. 220, Université Paris-Sud 11, F-91405 ORSAY cedex - France.

Optics Express
|June 4, 2008
PubMed
Summary
This summary is machine-generated.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Suspended Germanium-on-Silicon Photonic Integrated Circuits Operating in the Long-Wave Infrared and Their Use for Ethanol Sensing.

ACS photonics·2026
Same author

Current-Driven Symmetry Breaking and Spin-Orbit Polarization in Chiral Wires.

ACS nano·2026
Same author

Conventional Chromatographic Techniques and Biosensors for Mercury Speciation in Seafood: A Systematic Review.

Foods (Basel, Switzerland)·2026
Same author

Management of glaucoma as a neurodegenerative disease.

Neurodegenerative disease management·2026
Same author

Single-layer silicon metalens for broadband achromatic focusing and wide field of view.

Scientific reports·2025
Same author

High-speed integrated silicon germanium optical modulator with 3 GHz bandwidth in the 5-9 µm wavelength range.

Optics express·2025
Same journal

Denoising algorithm of Φ-OTDR systems based on adaptive fractional wavelet transform denoising.

Optics express·2026
Same journal

Millisecond photon-to-photon latency and high-speed volumetric projection system for optogenetics.

Optics express·2026
Same journal

Polarization-encoded coaxial structured light for high-precision 3D surface profilometry.

Optics express·2026
Same journal

Discrete freeform optical design based on collaborative optimization of point cloud and local normals.

Optics express·2026
Same journal

Ultrafast ghost imaging with 25 GHz speckle switching and wavelength-division multiplexing.

Optics express·2026
Same journal

Atomic vapor cells fabricated by femtosecond laser welding of standard-optical-quality glass.

Optics express·2026
See all related articles

High-efficiency silicon nitride grating couplers achieve over 60% coupling efficiency at 1.31 µm. These devices offer robust performance with 4° angular and 50 nm wavelength tolerances, demonstrating potential for integrated photonics.

Area of Science:

  • Photonics and Optical Engineering
  • Materials Science for Integrated Optics
  • Nanofabrication Techniques

Background:

  • Silicon nitride (SiN) waveguides are crucial for integrated photonic circuits due to their low loss and broad transparency.
  • Efficiently coupling light from optical fibers to SiN waveguides is a key challenge in device performance.
  • Surface grating couplers offer a promising solution for out-of-plane light coupling.

Purpose of the Study:

  • To design, fabricate, and characterize high-efficiency surface grating couplers for silicon nitride waveguides.
  • To evaluate the coupling efficiency, angular, and wavelength tolerances of the fabricated devices.
  • To investigate the impact of grating duty ratio on coupling performance.

Main Methods:

  • Design of surface grating structures using electromagnetic simulation tools.

More Related Videos

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
12:08

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Published on: July 18, 2015

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
12:19

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

Related Experiment Videos

Last Updated: Jul 4, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System
12:08

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

Published on: July 18, 2015

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
12:19

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

  • Fabrication of grating couplers on silicon nitride-on-insulator (SNOI) platforms using electron-beam lithography and etching.
  • Characterization of coupling efficiency, angular response, and wavelength dependence using a fiber-optic test setup.

    • Main Results:

    • Achieved coupling efficiencies exceeding 60% at a wavelength of 1.31 µm.
    • Demonstrated angular and wavelength -3 dB tolerances of 4° and 50 nm, respectively.
    • Observed coupling efficiency above 20% at 1.45 µm and identified a 50% duty ratio for maximum efficiency.

    Conclusions:

    • High-efficiency surface grating couplers for silicon nitride waveguides have been successfully demonstrated.
    • The developed grating couplers exhibit excellent performance metrics suitable for various photonic applications.
    • The study provides valuable insights into optimizing grating coupler design for silicon nitride integrated photonics.