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Fabrication and Testing of Photonic Thermometers

Fabrication and Testing of Photonic Thermometers

Published on: October 24, 2018

Controlling temperature dependence of silicon waveguide using slot structure.

Jong-Moo Lee¹, Duk-Jun Kim, Gwan-Ha Kim

¹ICCL, Electronics and Telecommunications Research Institute, 161 Gajong-dong, Yusong-gu, Daejeon 305-350, Korea. jongmool@etri.re.kr

|June 11, 2008

Summary

Researchers controlled silicon waveguide temperature dependence using a polymer-filled slot waveguide. This novel structure significantly reduces thermal wavelength shifts, improving device stability for optical applications.

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Area of Science:

Photonics and Optical Engineering
Materials Science

Background:

Silicon photonics devices exhibit temperature-dependent wavelength shifts, impacting performance.
Traditional silicon waveguides show a wavelength shift of 77 pm/°C for the TE mode.

Purpose of the Study:

To investigate the control of temperature dependence in silicon waveguides.
To explore the use of polymer-infiltrated slot waveguides for thermal stability.

Main Methods:

Fabrication of silicon waveguide ring resonators with and without slot structures.
Infiltration of slot structures with a polymer (WIR30-490).
Measurement of temperature-dependent wavelength shift for the TE mode.

Main Results:

A polymer upper cladding reduced the shift from 77 pm/°C to 66 pm/°C.
A polymer-filled slot waveguide reduced the shift to -2 pm/°C.
Optimization of slot width, silicon wire width, and slab height enabled significant temperature dependence reduction.

Conclusions:

Slot waveguide structures filled with polymer offer substantial control over temperature dependence.
This approach improves thermal stability in silicon photonic devices by approximately 8 times compared to non-slotted structures.