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Spectral and Angle-Resolved Magneto-Optical Characterization of Photonic Nanostructures
Published on: November 21, 2019
Multilayer coatings monitoring using admittance diagram
1Thin Film Technology Center/Department of Optics and Photonics, National Central University, Chung-Li, Taiwan. cclee@dop.ncu.edu.tw
Abstract:
A method based on admittance diagram called Admittance Real-time Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were compared with that of the conventional method by using runsheet diagram. The in situ error compensation of ARM showed a great improvement in the optical performance when utilized in an anti-reflection coating process.
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