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Updated: Jul 4, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Silicon nitride transmission X-ray mirrors.
Sterling Cornaby1, Donald H Bilderback
1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.
New silicon nitride X-ray mirrors act as tunable high-pass energy filters. These transmission mirrors enable precise selection of X-ray beam energies for synchrotron applications.
Area of Science:
- Materials Science
- Optics and Photonics
- X-ray Physics
Background:
- Transmission X-ray mirrors are crucial components in synchrotron radiation facilities.
- Existing filters often lack tunability or have limited energy ranges.
- Low-stress silicon nitride offers a promising material for advanced optical components.
Purpose of the Study:
- To fabricate and characterize novel transmission X-ray mirrors using silicon nitride.
- To demonstrate the tunable high-pass energy filtering capability of these mirrors.
- To evaluate the transmittance and angular dependence of the energy cut-off.
Main Methods:
- Fabrication of 300-400 nm-thick low-stress silicon nitride windows (0.6 mm x 85 mm).
- Utilizing the windows as high-pass energy filters at grazing incidence in an X-ray beam.
- Adjusting the incidence angle to select the desired energy cut-off.
Main Results:
- Achieved tunable energy cut-off from 8 to 12 keV by varying the incidence angle.
- Demonstrated a 10 keV cut-off for a 0.22-degree incidence angle with a 0.3 mm x 0.3 mm X-ray beam.
- Observed mirror transmittance exceeding 80% for a 300 nm-thick film.
Conclusions:
- Silicon nitride transmission X-ray mirrors provide a tunable high-pass energy filtering solution.
- The angle-dependent energy cut-off allows for precise X-ray beam conditioning.
- These mirrors offer high transmittance and are suitable for synchrotron applications.
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