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Microstructure characterization of multilayered TiSiN/CrN thin films.

Sheng-Min Yang¹, Yin-Yu Chang, Dong-Yih Lin

¹Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan, R. O. China.

Journal of Nanoscience and Nanotechnology

|June 25, 2008

Summary

This study synthesized monolayered TiSiN and multilayered TiSiN/CrN coatings. Multilayer periodic thicknesses were controlled by adjusting cathode current ratios, revealing a relationship between current and nanostructure.

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Area of Science:

Materials Science
Surface Engineering
Nanotechnology

Background:

Titanium silicon nitride (TiSiN) and chromium nitride (CrN) are advanced ceramic coatings.
Multilayer coatings offer enhanced properties compared to monolayers.
Controlling nanostructure is key to optimizing coating performance.

Purpose of the Study:

To synthesize and characterize monolayered TiSiN and multilayered TiSiN/CrN coatings.
To investigate the effect of cathode current ratio on multilayer periodic thickness.
To analyze the structural evolution of TiSiN/CrN coatings.

Main Methods:

Cathodic arc deposition using chromium and Ti/Si alloy targets.
X-ray diffraction (XRD) and Transmission Electron Microscopy (TEM) for structural analysis.

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Varied cathode current ratios (I[TiSi]/I[Cr]) to control coating composition and structure.

Main Results:

Both TiSiN and TiSiN/CrN films exhibited the B1-NaCl structure.
Multilayer periods (Lambda) of 8.3 nm, 6.2 nm, and 4.2 nm were achieved at different current ratios.
Decreasing I[TiSi]/I[Cr] ratios led to reduced multilayer periodic thicknesses.
An amorphous phase was observed at grain boundaries, and a well-defined lamellar structure was present between layers.

Conclusions:

The cathodic arc deposition process allows for controlled synthesis of TiSiN/CrN multilayer coatings.
Cathode current ratio is a critical parameter for tailoring multilayer periodic thickness.
The observed nanostructure, including amorphous phases and lamellar features, influences coating properties.