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Published on: September 24, 2017
Design of a MEMS discretized hyperbolic paraboloid geometry ultrasonic sensor microarray
Matthew Meloche1, Sazzadur Chowdhury
1Department of Electrical and Computer Engineering, University of Windsor, Windsor, Ontario, Canada.
Summary
A novel hyperbolic paraboloid array using capacitive micromachined ultrasonic transducers (CMUTs) offers broadband constant beamwidth beamforming without complex signal processing. This design enables advanced applications in automotive, medical, and industrial sensing.
Area of Science:
- Acoustics and Ultrasonics
- Microelectromechanical Systems (MEMS)
Background:
- Traditional beamforming arrays often require complex electronic signal processing for constant beamwidth.
- Capacitive micromachined ultrasonic transducers (CMUTs) offer potential for integrated and efficient ultrasonic systems.
Purpose of the Study:
- To design and model a discretized hyperbolic paraboloid beamforming array using CMUTs.
- To achieve intrinsic broadband constant beamwidth beamforming without external signal processing.
- To develop a methodology for designing such arrays and modeling the CMUTs.
Main Methods:
- Development and verification of a mathematical model for array response characterization.
- Design methodology for determining array dimensions and CMUT modeling.
- Cross-verification of CMUT design using lumped element modeling, 3-D electromechanical finite element analysis (FEA), and microfabrication simulation.
Main Results:
- Successful design of two CMUT arrays with hyperbolic paraboloid geometry, operating in different frequency ranges (2.3-5.2 MHz and 113-167 kHz).
- Demonstration of intrinsic broadband constant beamwidth beamforming capability.
- Validated CMUT design through a comprehensive cross-verification approach.
Conclusions:
- The proposed hyperbolic paraboloid CMUT array design offers a simplified approach to achieving constant beamwidth beamforming.
- The developed design methodology is effective for creating specialized ultrasonic arrays.
- Potential applications include real-time automotive collision avoidance, medical imaging/therapy, and industrial sensing.

