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A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor

Sujitha Vejella1, Sazzadur Chowdhury1

  • 1Electrical and Computer Engineering Department, University of Windsor, Windsor, ON N9B 3P4, Canada.

Sensors (Basel, Switzerland)
|July 2, 2021
PubMed

Keywords:
MEMSUWBplanar inductorpower sensorvibrating diaphragm capacitor

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