Subcutoff microwave driven plasma ion sources for multielemental focused ion beam systems

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Updated: Jul 3, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
07:17

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

Published on: August 1, 2017

Jose V Mathew1, Abhishek Chowdhury, Sudeep Bhattacharjee

  • 1Department of Physics, Indian Institute of Technology, Kanpur, India.

The Review of Scientific Instruments
|July 8, 2008
PubMed

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