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Updated: Jul 3, 2026

Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
X-ray analysis and mapping by wavelength dispersive X-ray spectroscopy in an electron microscope
Miyoko Tanaka1, Masaki Takeguchi, Kazuo Furuya
1National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan. TANAKA.Miyoko@nims.go.jp
Abstract:
A compact and easy-to-use wavelength dispersive X-ray spectrometer using a multi-capillary X-ray lens attached to a scanning (transmission) electron microscope has been tested for thin-film analysis. B-K spectra from thin-film boron compounds (B4C, h-BN, and B2O3) samples showed prominent peak shifts and detailed structural differences. Mapping images of a thin W/Si double-layer sample resolved each element clearly. Additionally, a thin SiO2 film grown on a Si substrate was imaged with O-K X-rays. Energy and spatial resolution of the system is also discussed.
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