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Simple and economical capacitive displacement system for UHV operation
1Department of Materials Science and Engineering, Stanford University, Stanford, California 94305.
The Review of Scientific Instruments
|December 1, 1979
Summary
A parallel plate capacitor functions as a displacement transducer in ultra-high vacuum (UHV). This capacitive system offers a 2.5 micrometer linear range and 0.051 micrometer resolution using standard lab equipment.
Area of Science:
- Physics
- Materials Science
- Instrumentation
Background:
- Ultra-high vacuum (UHV) environments require specialized instrumentation.
- Capacitive sensing is a viable method for precise displacement measurement.
Purpose of the Study:
- To develop and evaluate a parallel plate capacitor as a displacement transducer for UHV applications.
- To assess the linearity and resolution of the capacitive displacement system.
Main Methods:
- Assembly of a parallel plate capacitor for UHV operation.
- Utilized common laboratory instruments for the electric circuit.
- Characterized the displacement measurement performance.
Main Results:
- The capacitive displacement system demonstrated linearity over a 2.5 micrometer range.
- Achieved a resolution of 0.051 micrometers.
- The system integrated readily with standard laboratory equipment.
Conclusions:
- A parallel plate capacitor is effective as a displacement transducer in UHV.
- The developed system provides high resolution and linearity for precise measurements.
- The use of common laboratory instruments simplifies implementation.
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