Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates

Ion Bita1, Joel K W Yang, Yeon Sik Jung

  • 1Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA.

Science (New York, N.Y.)
|August 16, 2008
PubMed
Summary

Templated self-assembly of block copolymers using nanoscale topographical elements creates ordered arrays. This technique enables defect-free, high-density nanostructures for advanced nanolithography applications.