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Measurement method of aberration from Ronchigram by autocorrelation function
H Sawada1, T Sannomiya, F Hosokawa
1CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan. hsawada@jeol.co.jp
Ultramicroscopy
|August 22, 2008
Summary
Fifth-order aberrations were measured using Ronchigram analysis in a new 300kV microscope. This method accurately characterized aberrations, validating the spherical aberration corrector
Area of Science:
- Electron microscopy
- Optical physics
Background:
- Accurate aberration measurement is crucial for high-resolution electron microscopy.
- Spherical aberration correctors enhance imaging performance but require precise calibration.
Purpose of the Study:
- To measure high-order aberrations in a novel 300kV microscope.
- To validate the performance of a spherical aberration corrector for probe-forming systems.
Main Methods:
- Utilized an autocorrelation function of segmental Ronchigram areas for aberration measurement.
- Applied the method to a new 300kV microscope equipped with a spherical aberration corrector.
- Calculated simulated Ronchigrams using measured aberrations for comparison.
Main Results:
- Successfully measured aberrations up to the fifth-order.
- Experimental Ronchigrams showed excellent agreement with simulated ones.
- Demonstrated an infinite magnification area with a 50mrad half-angle.
Conclusions:
- The autocorrelation method is effective for measuring high-order aberrations.
- The new 300kV microscope with a spherical aberration corrector performs as expected.
- Validated the accuracy of aberration measurement for advanced electron microscopy.
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