Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Vitamin D status tracks inflammation perfusion and pregnancy in polycystic ovary syndrome.

iScience·2026

Same author

Protective effects of Passiflora edulis Sims peel fermentation polysaccharide against UVB-induced photodamage via antioxidant and anti-inflammatory activities.

Bioresources and bioprocessing·2026

Same author

Lactobacillus gasseri extracellular proteins suppress acne inflammation and sebum secretion via the PI3K/AKT/mTOR pathway.

Bioresources and bioprocessing·2026

Same author

Correction to "Probiotic Spore-Based Oral Biotherapeutics Promote Brain Targeting toward Gut-Brain Dual-Regulation for Parkinson's Disease Treatment".

ACS nano·2026

Same author

Bright light therapy induces insular frequency-specific functional plasticity in young adults with subthreshold depression: A randomized, double-blind, placebocontrolled study.

Neural regeneration research·2026

Same author

Probiotic Spore-Based Oral Biotherapeutics Promote Brain Targeting toward Gut-Brain Dual-Regulation for Parkinson's Disease Treatment.

ACS nano·2026

Same journal

Denoising algorithm of Φ-OTDR systems based on adaptive fractional wavelet transform denoising.

Optics express·2026

Same journal

Millisecond photon-to-photon latency and high-speed volumetric projection system for optogenetics.

Optics express·2026

Same journal

Polarization-encoded coaxial structured light for high-precision 3D surface profilometry.

Optics express·2026

Same journal

Discrete freeform optical design based on collaborative optimization of point cloud and local normals.

Optics express·2026

Same journal

Ultrafast ghost imaging with 25 GHz speckle switching and wavelength-division multiplexing.

Optics express·2026

Same journal

Atomic vapor cells fabricated by femtosecond laser welding of standard-optical-quality glass.

Optics express·2026

See all related articles

Search research articles

Related Experiment Video

Updated: Jul 2, 2026

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Published on: June 7, 2019

Sub-diffraction-limited interference photolithography with metamaterials.

Ting Xu¹, Yanhui Zhao, Junxian Ma

¹State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, PO Box 350, Chengdu 610209, China.

|September 6, 2008

Summary

This summary is machine-generated.

Researchers developed a new interference lithography method using anisotropic metamaterials. This technique overcomes the diffraction limit to create 40nm nanostructures, offering a novel way to fabricate large-area nanostructures.

More Related Videos

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Published on: December 11, 2014

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

Related Experiment Videos

Last Updated: Jul 2, 2026

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Published on: June 7, 2019

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Patterning via Optical Saturable Transitions - Fabrication and Characterization

Published on: December 11, 2014

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

Area of Science:

Nanotechnology
Materials Science
Optics

Background:

Conventional lithography is limited by the diffraction limit of light.
Fabricating large-area nanostructures with high resolution remains a challenge.

Purpose of the Study:

To theoretically demonstrate an interference lithography technique that surpasses the diffraction limit.
To enable the fabrication of nanostructures with feature sizes smaller than the wavelength of light.

Main Methods:

Utilizing an anisotropic metamaterial placed under a conventional lithographic mask.
Leveraging the unique dispersion characteristics of metamaterials to enhance evanescent waves.
Employing rigorous coupled wave analysis (RCWA) for theoretical validation.

Main Results:

The proposed technique allows for the transmission of high spatial frequency evanescent waves.
Successful theoretical patterning of one-dimensional periodical structures with 40nm features using 442nm exposure light.
Demonstration of a method to overcome the diffraction limit in interference lithography.

Conclusions:

Anisotropic metamaterials can be used to achieve interference lithography beyond the diffraction limit.
This technique offers a viable alternative for fabricating large-area, high-resolution nanostructures.
The findings open new possibilities in advanced nanofabrication.