MRT letter: full-tilt electron tomography with a piezo-actuated rotary drive

Piezoelectric nanoactuation, which is rapidly becoming established as state-of-the-art positioning control in transmission electron microscopy (TEM), is extended here to include a rotational degree of freedom. A piezoelectric goniometer with both translational and rotary drive action has been designed with high level of miniaturization to fit into a standard TEM specimen holder shaft without compromising any of the performance of the default TEM goniometer and without any modifications to the TEM. Enhanced functionality of such a goniometer-in-goniometer is outlined and experimental results for electron tomography of nanostructures over a full tilt range of views, without any missing angles, are demonstrated.