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Vacancy formation and strain in low-temperature Cu/Cu(100) growth

Yunsic Shim1, Valery Borovikov, Blas P Uberuaga

  • 1Department of Physics & Astronomy University of Toledo, Toledo, Ohio 43606, USA.

Physical Review Letters
|October 15, 2008
PubMed
Summary

Compressive strain in low-temperature metal thin films results from nanoscale surface roughness. This roughness is caused by suppressed thermal events and shadowing during off-normal deposition, not vacancies.

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