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Updated: Jun 29, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Ch Strelow1, H Rehberg, C M Schultz
1Institut für Angewandte Physik und Zentrum für Mikrostrukturforschung, Universität Hamburg, Jungiusstrasse 11, Hamburg, Germany.
We created novel optical microtube resonators with a bottle shape. Their unique geometry allows for precise control over light modes and energy dispersion, opening new possibilities in photonics.
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