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Determination of Crystal Structures

Determination of Crystal Structures

In the late 1800s, the revelation that light extended beyond visible wavelengths led to the discovery of X-rays by Wilhelm Roentgen. Recognized as high-energy electromagnetic radiation with short wavelengths, X-rays prompted exploration into their interaction with crystals. Max von Laue proposed in 1912 that the periodic arrangement of atoms, ions, or molecules in crystals would cause them to diffract X-rays, a hypothesis confirmed through experiments with copper sulfate and zinc sulfide...

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Updated: Jun 29, 2026

Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Si lattice parameter measurement by centimeter X-ray interferometry.

Luca Ferroglio¹, Giovanni Mana, Enrico Massa

¹Politecnico di Torino, Torino, Italy.

|October 15, 2008

Summary

A new X-ray and optical interferometer precisely measures silicon crystal lattice parameters. This advanced apparatus achieves a 3 x 10(-9) relative uncertainty, demonstrating its high capability for precise measurements.

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Area of Science:

Solid State Physics
Crystallography
Metrology

Background:

Accurate measurement of crystal lattice parameters is crucial for semiconductor research and development.
Existing interferometry techniques have limitations in precision and scope.

Purpose of the Study:

To introduce a novel combined X-ray and optical interferometer.
To evaluate the performance and precision of this new apparatus for measuring silicon crystal lattice parameters.

Main Methods:

Development of a combined X-ray and optical interferometer system.
Capability for measuring centimeter displacements.
Utilizing the apparatus for test measurements on silicon (Si) crystals.

Main Results:

Achieved a relative uncertainty of 3 x 10(-9) in lattice parameter measurements.
Demonstrated the apparatus's effectiveness in precise metrology.
Validated the capabilities of the combined interferometry technique.

Conclusions:

The developed interferometer offers unprecedented precision for lattice parameter determination.
This technology has significant implications for materials science and semiconductor manufacturing.
The apparatus is capable of meeting stringent metrological requirements.