Si lattice parameter measurement by centimeter X-ray interferometry
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Updated: Jun 29, 2026

16:11
Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Luca Ferroglio1, Giovanni Mana, Enrico Massa
1Politecnico di Torino, Torino, Italy.
Optics Express
|October 15, 2008
Abstract:
A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.
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