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Updated: Jun 28, 2026

Induction of Microstreaming by Nonspherical Bubble Oscillations in an Acoustic Levitation System
Published on: May 9, 2021
A self-running standing wave-type bidirectional slider for the ultrasonically levitated thin linear stage.
Daisuke Koyama1, Hiroyuki Takei, Kentaro Nakamura
1Precision & Intell. Lab., Tokyo Inst. of Technol., Yokohama. dkoyama@sonic.pi.titech.ac.jp
This study introduces an ultrasonically levitated slider for linear stages, utilizing acoustic forces for movement. Optimized vibration patterns achieved significant thrust and levitation, demonstrating a novel acoustic manipulation method.
Area of Science:
- Acoustics
- Materials Science
- Mechanical Engineering
Background:
- Ultrasonic levitation offers contactless manipulation capabilities.
- Standing wave-type acoustic levitators require precise control of acoustic fields.
- Linear stages demand stable and controllable motion for precision applications.
Purpose of the Study:
- To design and analyze a self-running, ultrasonically levitated slider for a thin linear stage.
- To investigate the use of acoustic radiation force and acoustic streaming for levitation and movement.
- To optimize slider configuration for enhanced thrust and levitation performance.
Main Methods:
- Finite Elemental Analysis (FEA) for simulating sound pressure distribution and vibration modes.
- Experimental validation using a fiber optic probe to compare FEA results.
- Fabrication of a slider using an aluminum vibrating plate and a piezoelectric zirconate titanate (PZT) element.
Main Results:
- Achieved large asymmetric vibration distribution for high thrust and levitation.
- Validated FEA predictions of sound pressure distribution with experimental data.
- Demonstrated slider levitation and bidirectional movement (at 68 kHz and 69 kHz) via acoustic radiation force and streaming.
- Observed maximum thrust of 19 mN, with thrust increasing at smaller levitation distances.
Conclusions:
- The proposed slider design enables self-running ultrasonic levitation and precise movement on a linear stage.
- Acoustic streaming direction can be controlled by altering the slider's vibration mode.
- Optimized asymmetric vibration is key to achieving high performance in acoustic levitation and propulsion.
- This technology holds promise for contactless micro-manipulation and precision positioning systems.
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