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Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens
1Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan. sllee@pme.nthu.edu.tw
Optics Express
|November 26, 2008
Summary
This study numerically simulates a micro-lens system, confirming its tunable focal length. Applying an electric field effectively eliminates spherical aberration in the micro-lens.
Area of Science:
- Optics
- Microelectromechanical Systems (MEMS)
Background:
- Fabricating tunable optical systems below 1000 micrometers is challenging using conventional methods.
- A previous MEMS-based liquid micro-lens system used electrowetting but suffered from spherical aberration.
Purpose of the Study:
- To numerically simulate a MEMS-based tunable liquid micro-lens system.
- To investigate the elimination of spherical aberration in micro-lenses using an applied electric field.
Main Methods:
- Solving the Young-Laplace equation to model the liquid-liquid interface and meniscus shape.
- Applying an electric field to alter the Young-Laplace equation and modify the meniscus shape.
Main Results:
- Numerical simulations accurately reproduced the experimental back focal length tuning range.
- Spherical aberration was significantly reduced by applying an optimized electric field.
Conclusions:
- Numerical simulation is a viable tool for analyzing MEMS micro-lens systems.
- Electric field application offers a method to correct aberrations in tunable liquid micro-lenses.
