Geometrical analysis of third-order aberrations for a solid immersion lens.

Matthew Lang1, Eric Aspnes, Tom D Milster

  • 1College of Optical Sciences, University of Arizona, Tucson, Arizona 85721, USA. mattlang@gmail.com

Optics Express
|November 26, 2008
PubMed
Summary

This study presents a general method for analyzing aberrations in solid-immersion lenses (SILs). It reveals critical thickness tolerances for high-index SILs and hemispheres, impacting optical system design.

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