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Updated: Jun 27, 2026

High Speed Sub-GHz Spectrometer for Brillouin Scattering Analysis

High Speed Sub-GHz Spectrometer for Brillouin Scattering Analysis

Published on: December 22, 2015

High-resolution microspectrometer with an aberration-correcting planar grating.

Semen Grabarnik¹, Arvin Emadi, Huaiwen Wu

¹Faculty Electrical Engineering, Mathematics and Computer Science, Department of MicroElectronics/Electronic Instrumentation, Delft University of Technology, Mekelweg 4, 2628 CD,Delft, The Netherlands. s.grabarnik@tudelft.nl

|November 28, 2008

Summary

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This study introduces a compact, two-component spectrometer using microelectromechanical systems (MEMS) technology. The miniaturized device achieves high spectral resolution and low fabrication costs for advanced optical sensing applications.

Area of Science:

Optics and Photonics
Microelectromechanical Systems (MEMS)

Background:

Miniaturization of optical instruments is crucial for portable sensing.
Traditional spectrometers are often bulky and expensive.
MEMS technology offers a pathway to highly integrated and cost-effective optical devices.

Purpose of the Study:

To present a concept for a highly miniaturized spectrometer.
To demonstrate a two-component design leveraging MEMS fabrication.
To achieve diffraction-limited performance in a compact form factor.

Main Methods:

Fabrication of a planar chip integrating input slit, aberration-correcting diffraction grating, and image sensor using MEMS batch processes.
Integration with a single external spherical mirror.

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Last Updated: Jun 27, 2026

High Speed Sub-GHz Spectrometer for Brillouin Scattering Analysis

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Published on: December 22, 2015

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Optimization of grating structure to correct aberrations and achieve diffraction-limited performance.

Main Results:

A prototype spectrometer with a volume of 0.5 cm³ was successfully fabricated and characterized.
Achieved a Full Width at Half Maximum (FWHM) spectral resolution of 0.7 nm over a 350 nm bandwidth (420 nm to 770 nm).
Demonstrated an etendue of 7.4x10⁻⁵ mm² sr, indicating efficient light collection.

Conclusions:

The presented MEMS-based spectrometer concept enables highly miniaturized, low-cost, and high-performance optical sensing.
The two-component design with an aberration-correcting grating simplifies alignment and reduces manufacturing costs.
This technology holds promise for various applications requiring portable spectral analysis.