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Large step-height measurements using multiple-wavelength holographic interferometry with tunable laser diodes.

Atsushi Wada1, Makoto Kato, Yukihiro Ishii

  • 1Department of Applied Physics, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8601, Japan. a24wada@nda.ac.jp

Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|November 28, 2008
PubMed
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This study demonstrates accurate measurement of large step heights up to 18 mm using multiple-wavelength holographic interferometry with laser diodes. The method achieves high precision, with an RMS error of 0.04 mm, by utilizing tunable lasers for phase unwrapping.

Area of Science:

  • Optics and Photonics
  • Metrology
  • Laser Technology

Background:

  • Accurate measurement of large step heights is crucial in various industrial and scientific applications.
  • Traditional interferometry methods face limitations in measuring large displacements due to phase ambiguity.
  • Multiple-wavelength interferometry offers a potential solution to extend measurement range.

Purpose of the Study:

  • To develop and validate a multiple-wavelength holographic interferometry technique for precise measurement of large step heights.
  • To leverage the tunability of laser diodes to enhance measurement accuracy and range.
  • To investigate the requirements for successful phase unwrapping in this system.

Main Methods:

  • Utilized laser diodes with high-resolution wavelength tunability.

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  • Recorded pairs of holograms with a minimal wavelength difference (<0.01 nm).
  • Extracted phase differences using a large synthetic wavelength, ranging from 2.5 to 73 mm.

    • Main Results:

    • Achieved accurate measurement of an 18 mm step height with a root-mean-square (RMS) error of 0.04 mm.
    • Demonstrated the extraction of phase differences across a wide range of synthetic wavelengths.
    • Identified precise knowledge of recording wavelengths as critical for phase unwrapping.

    Conclusions:

    • Multiple-wavelength holographic interferometry with tunable laser diodes is a viable method for accurate large step height measurement.
    • The technique overcomes limitations of conventional interferometry by employing large synthetic wavelengths.
    • Successful phase unwrapping is contingent upon accurate wavelength determination.