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Updated: Jun 27, 2026
Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Focusing synchrotron radiation using a polycapillary half-focusing X-ray lens for imaging
Tianxi Sun1, Meiling Zhang, Zhiguo Liu
1The Key Laboratory of Beam Technology and Materials Modification of Ministry of Education, Beijing Normal University, Beijing 100875, People's Republic of China.
Abstract:
An imaging system based on a polycapillary half-focusing X-ray lens (PHFXRL) and synchrotron radiation source has been designed. The focal spot size and the gain in power density of the PHFXRL were 22 microm (FWHM) and 4648, respectively, at 14.0 keV. The spatial resolution of this new imaging system was better than 5 microm when an X-ray charge coupled device with a pixel size of 10.9 x 10.9 microm was used. A fossil of an ancient biological specimen was imaged using this system.
