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Updated: Jun 26, 2026

Investigating Single Molecule Adhesion by Atomic Force Spectroscopy
Published on: February 27, 2015
Marie-Charlotte Audry1, Stella Ramos, Elisabeth Charlaix
1Université de Lyon, F-69003 Lyon, Laboratoire PMCN Université Lyon 1, CNRS UMR5586, F-69622 Villeurbanne, France.
This study quantifies the adhesion force between sapphire contaminant particles and rough alumina reactor surfaces in microelectronics manufacturing. Numerical simulations predict adhesion statistics to optimize particle removal strategies.
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