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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Published on: July 17, 2015

Electron beam confinement and image contrast enhancement in near field emission scanning electron microscopy

T L Kirk1, L G De Pietro, D Pescia

  • 1Laboratorium für Festkörperphysik, Eidgenössische Technische Hochschule Zürich (ETH), CH-8093 Zürich, Switzerland. tkirk@phys.ethz.ch

Ultramicroscopy
|January 7, 2009
PubMed

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