Reactive multilayers examined by HRTEM and plasmon EELS chemical mapping.

M A Mat Yajid1, G Möbus

  • 1Department of Engineering Materials, University of Sheffield, Sheffield S1 3JD, UK. m.azizi@sheffield.ac.uk

Summary

This study maps chemical phases in copper-aluminum (Cu-Al) multilayer systems using electron energy loss spectroscopy. Sharply bound epitaxial phases were identified, demonstrating the technique

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