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Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
Accelerating Atomic Force Microscopy Imaging based on an Optimized Path Planning Method
Peng Cheng1, Yingzi Li1, Rui Lin1
1School of Physics, Beihang University, Xueyuan Road No. 37, Haidian District, Beijing 100191, China.
Abstract:
Based on compressed sensing, undersampling is a low cost and efficient way to speed up the process of atomic force microscopy (AFM) imaging. The under-sampled information obtained is important in producing high-quality reconstructed images. Different samples and dynamic measurement show different characteristic of topography, which makes it impossible to acquire acceptable AFM image with same under-sampled scanning pattern. This work aims to propose an unsampling path planning method for effective under-sampled image acquisition. The preprocess is realized by object detection and k-means method. The path planning method combines Self-Organizing Map, Ant Colony Optimization and B-Spline. Through parallel calculation and cluster analysis, large-scale traveling salesman problem (L-TSP) is divided into several small-scale traveling salesman problems. After undersampling, the reconstruction process is realized by Bayesian compressed sensing. Several path planning algorithms are performed for comparison. An experimental example of L-TSP in AFM is carried out. Experimental and application results demonstrate that the proposed method can optimize scanning path of tens of thousands under-sampled points within minute. The proposed method succeeds to save time and guarantee the quality of AFM imaging.
