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Updated: Jun 25, 2026
Preparation of Functional Silica Using a Bioinspired Method
Published on: August 1, 2018
The preparation and low-k application of asymmetric functionalized cyclodextrin templated nanoporous silsesquioxane
Jin-Heong Yim1, Young-Kwon Park, Jong-Ki Jeon
1Division of Advanced Materials Engineering, Kongju National University, 182 Gongju, Korea.
Abstract:
Several kinds of Asymmetric Functionalized Cyclodextrin (AFCD), as a porogen, have been introduced for the first time to investigate their potential in the field of low-k applications. The novel AFCD templated films were compared in terms of their pore forming efficiency and the pore structure, such as pore size and pore size distribution. Of the AFCDs, btCD and tbsCD showed fairly good pore forming efficiencies. The pore diameter generating form of AFCD was larger than that of conventional CD (tCD) at a high porogen loading (> 30 wt%), which might have been due to the micelle-like assembled behavior of the AFCD porogen as a supramolecular surfactant. Ultra low-k films (k < 1.5) can be effectively made using the AFCD porogen. Mechanical properties, such as hardness and elastic modulus, decrease with increasing AFCD porogen loading.
