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Updated: Jun 25, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1Laboratoire Kastler Brossel, UMR 8552 Ecole Normale Supérieure, UPMC, CNRS 24 rue Lhomond, 75231 Paris Cedex 05, France.
Sideband digital holography quantitatively measures vibration amplitudes of objects. This technique allows for precise measurement of oscillations larger than optical wavelengths, revealing vibration shapes.
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