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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Imaging a vibrating object by Sideband Digital Holography

F Joud1, F Laloë, M Atlan

  • 1Laboratoire Kastler Brossel, UMR 8552 Ecole Normale Supérieure, UPMC, CNRS 24 rue Lhomond, 75231 Paris Cedex 05, France.

Optics Express
|February 17, 2009
PubMed

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