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Published on: September 27, 2013
Encapsulation of an integrated neural interface device with Parylene C
Jui-Mei Hsu1, Loren Rieth, Richard A Normann
1Department ofMaterials Science and Engineering, University of Utah, Salt Lake City, UT 84112, USA. juimei.hsu@utah.edu
IEEE Transactions on Bio-Medical Engineering
|February 20, 2009
Summary
Parylene-C coatings provide stable, long-term dielectric encapsulation for neural interfaces, protecting devices in the body. Oxygen plasma etching effectively exposes electrode tips for optimal neural device function.
Area of Science:
- Biomaterials Engineering
- Neuroscience
- Medical Device Technology
Background:
- Neural disorders necessitate advanced neural interfaces for functional restoration.
- Robust, biocompatible dielectric encapsulation is critical for neural interface longevity and performance.
- Parylene-C is a promising material for implantable electronic encapsulation due to its properties.
Purpose of the Study:
- To evaluate Parylene-C as a chronic dielectric encapsulation for neural interfaces.
- To assess the long-term stability and insulating properties of Parylene-C in a physiological environment.
- To investigate oxygen plasma etching for exposing electrode tips and its effect on electrode impedance.
Main Methods:
- Chemical vapor deposition of Parylene-C films.
- Impedance spectroscopy and leakage current measurements in 37°C saline.
- Optical microscopy for assessing coating conformity and uniformity.
- Comparison of isotropic and anisotropic oxygen plasma etching techniques.
Main Results:
- Parylene-C demonstrated stable electrical insulation for over one year in saline.
- Oxygen plasma etching was effective in patterning Parylene-C and exposing electrode tips.
- Small thickness variations were observed on complex 3D electrode arrays.
- The relationship between electrode tip exposure and impedance was established.
Conclusions:
- Parylene-C provides reliable, long-term dielectric encapsulation for neural interface devices.
- Oxygen plasma etching is a viable method for fabricating and customizing Parylene-C based neural interfaces.
- The study confirms Parylene-C's suitability for implantable neural electronic applications.

