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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Sharing of secondary electrons by in-lens and out-lens detector in low-voltage scanning electron microscope equipped

Kazuhiro Kumagai1, Takashi Sekiguchi

  • 1Graduate School of Pure and Applied Science, University of Tsukuba, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan. KUMAGAI.kazuhiro@nims.go.jp

Ultramicroscopy
|February 28, 2009
PubMed

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